Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness
نویسندگان
چکیده
منابع مشابه
Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness
Electrostatically actuated torsional micromirrors are key elements in Micro-Opto-Electro- Mechanical-Systems. When forced by means of in-plane comb-fingers, the dynamics of the main torsional response is known to be strongly non-linear and governed by parametric resonance. Here, in order to also trace unstable branches of the mirror response, we implement a simplified continuation method with a...
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ژورنال
عنوان ژورنال: Sensors
سال: 2017
ISSN: 1424-8220
DOI: 10.3390/s17040779